Ms. Dewi SURYANA
Staff Field Process Engineer, Lam Research, Singapore
DEWI SURYANA is a field process engineer at Lam Research, with over 9 years of experience in the semiconductor industry.
Her domain of expertise is in hard mask open and high aspect-ratio channel hole dry etch applications and she has worked across multiple technology nodes evolution in 3D NAND.
She is a process subject matter expert in multiple Lam dry etch products including Kiyo F to Kiyo G series, Flex series and Sense-i tools.
Dewi received her B.Eng in Materials Science and Engineering from Nanyang Technological University and obtained her M.Sc in Management of Technology from National University of Singapore.
Presentation Title
In-situ Atomic Layer Deposition in Etch System & Using Virtual Simulation to Optimize Process