Mr. Russell DOVER

 Work Experience

• Lam Research Corporation (2013~ Current): Managing Director and General Manager Service Product Line
• ASML (2009 - 2013): 
• Product Marketing Advanced Software
• KLA-Tencor (1996 - 2008)
• Product Marketing Applications Engineering
• Product Marketing Brightfield Defect Inspection
• Applications Engineering Brightfield Defect Inspection
• GEC Plessey Semiconductor (1993 – 1996)
• Process Engineering (LPCVD, Implant, Etch)

Educational background

• B.S. degree in Chemical Physics from University of Bristol, UK
• MSc. degree in Electronic Materials from University of Bristol, UK
• Executive MBA from Santa Clara University, USA

Presentation Title

Delivering on the promise of artificial intelligence and machine learning

Abstract

To deliver on the promise of machine learning (ML) and artificial intelligence (AI) for semiconductor process tool productivity we need a holistic approach that includes advances on the tools themselves for individual tool control, as well as a big-data off-tool approach for fleet control and productivity. A critical element for success in this space is tool and process domain knowledge which exists on both the manufacturer and supplier side, meaning true collaboration and knowledge transfer are required. Lam Research has been executing to this vision with its Equipment Intelligence™ (EI) offering for a number of years and has delivered high-value productivity outcomes for many of our customers. This presentation will share Lam’s EI vision and some examples of these outcomes.