Dr. Joseph ERVIN
Managing Director, Semiverse Products, Lam Research
Dr. Joseph Ervin is the product line head of Semiverse™ Solutions group at Lam Research. Dr. Ervin joined Lam Research in 2017 as a part of Lam’s acquisition of Coventor. Previously, he worked for IBM on semiconductor device and integration development at multiple research and foundry locations, including IBM, ST Microelectronics, the College of Nanoscale Science and Engineering, and at GlobalFoundries. His current position includes managing software product development and deployment for next node semiconductor integration challenges, along with development of unique methods for modeling and solving these issues. He holds a Ph.D. in Device Physics from Arizona State University. He has over 60 issued patents and over 50 publications.
Presentation Title
Manufacturing with Virtual Silicon: The Role of Process Modeling and Machine Learning in High-Volume Semiconductor Manufacturing
Abstract
We’ve now reached the point where “virtual” silicon twins and artificial intelligence are helping to produce the next generation of computer chips. Virtual silicon models, that include virtual fab processes and virtual metrology data, are now an integral part of the digital transformation of semiconductor manufacturing. In this talk, we will discuss how semiconductor production is being aided by virtual silicon and “virtual twins” and will discuss innovative techniques that use virtual silicon to address high volume semiconductor manufacturing challenges. These techniques include virtual process modeling, virtual metrology, and virtual process optimization with design of experiments (DOEs). Machine learning is also valuable in virtual silicon modeling and can complement human intelligence and experience to improve manufacturing and yield. Specific examples of using these tools to provide real-time feed-forward and feedback optimization will be discussed during this session, with demonstrated improvements highlighted in semiconductor manufacturability and yield.