Dr. Slava LIBMAN
Chief Executive Officer, FTD solutions
Dr. Slava Libman is the CEO of FTD Solutions, a company at the forefront of digital solutions for water management and environmental sustainability in industrial facilities. With over 30 years of experience in water technology, Dr. Libman has served in diverse technical and leadership roles within the semiconductor industry.
As co-chair of the Semiconductor Technology Roadmap, Dr. Libman specializes in ultrapure water, water management, and yield enhancement. He also leads the development of semiconductor standards in these critical fields and actively coordinates industry conferences and webinars.
Prior to co-founding FTD Solutions, Dr. Libman contributed significantly to a leading semiconductor company, a major architectural and engineering (A&E) firm, and a premier analytical laboratory. He holds a Ph.D. in Environmental Engineering from the Technion–Israel Institute of Technology.
Presentation Title
Addressing Water Circularity Management while Building Resilience of the Fab Facility Infrastructure
Abstract
As semiconductor manufacturing expands into water-stressed regions, water risk has become a top concern for industry leaders. Per World Economic Forum publication, a 2023 survey revealed that 73% of senior decision-makers in semiconductor companies identify natural resources, including water, as significant environmental risks to their operations. Traditional water management approaches, characterized by fragmented data systems and limited integration, often fall short in proactively addressing these challenges.
This presentation explores the limitations of conventional water circularity management in semiconductor fabs, where wastewater is treated and either discharged or reclaimed for reuse in non-process applications or recycled into ultrapure water (UPW) systems. Failures in these systems can lead to costly treatment measures, regulatory violations, and operational disruptions.
To build resilience and enhance sustainability, we introduce the concept of Active Circularity Management. ACM offers an integrated approach that combines real-time data monitoring, standardized processes aligned with industry best practices, and centralized expertise. This holistic strategy enables semiconductor manufacturers to maintain up-to-date insights into water flows and chemistry, make informed decisions, and optimize operations to reduce costs and increase reuse rates.
Implementing ACM involves:
- Holistic Visualization: Centralizing all relevant data to identify gaps, risks, and opportunities.
- Standardized Processes leveraging SEMI F98 Standard KPIs: Applying industry standards to ensure consistent, high-performance outcomes across facilities.
- Centralized Expertise: Integrating solutions to achieve optimal results