Mr. Karl URQUHART
Director of R&D, Chemical Product Technology Manager Diversified Fluid Solutions (DFS), an Exyte Group Company
Karl Urquhart is Director of R&D and Technology for DFS. He is an innovative experienced process engineering expert professional with 37 years of experience in the Advanced Electronic, Chemical Processing, and Semiconductor industries. He has numerous patents, and awards in chemical processes, handling, and blending applications.
Diversified Fluid Solutions (DFS) specializes in Ultra High Purity (UHP) chemical and gas systems for the semiconductor industry. Our product portfolio includes blending, and delivery equipment for all required applications in gas, precursor materials, aqueous chemicals, and CMP slurries. We engineer and manufacture precise, reliable, and space efficient systems with advanced monitoring and control through a state-of-the-art user interface.
Presentation Title:
Smarter and More Resilient Supply of Ultra High Purity NH4OH with Reduced Environmental Impact
New fabs material demand for some molecules such as NH4OH are increasing faster than the supply capacity. Exyte with its various subsidiaries can deliver state-of-the-art turnkey solutions for on-site generation of the molecule, reducing cost, waste, and transportation requirements.
The DFS NH4OH Fusion Blending System produces ultra-high purity (UHP) Ammonium Hydroxide (NH4OH) that can meet and exceed all Semi C21-0618 grades and tiers. This is accomplished by combining any incoming source of Ammonia Gas (NH3) gas with a customer or factory’s Ultra-Pure Water (UPW) supply. Removing the logistical difficulties of this chemical supply chain and improving purity. Ensuring this critical material keeps pace with growing chip supply and demand. Accomplished in a closed loop process, on-site at a customer’s location, with onboard in-situ metrology, it ensures there is no undiscovered contamination in the supply to the factory. Process has little to no waste affluent in the production and supply cycles by design. The DFS systems are proven to produce the highest process grade, and tier chemical with less than 10 ppt impurity levels. This is regardless of incoming source gas quality due to built-in gas purification. Simply the purist chemical product you can get for your applications.